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WAT Tester

Provides accurate and highly automated testing solutions

Introduction

Semitronix' WAT tester offers customers precise and highly automated testing solutions for fast and better process monitoring. The tester saves time in measuring various parameters of semiconductor wafers. The efficiency is greatly improved when the tester is used with Semitronix' addressable chip solution. Semitronix' WAT tester is used in the mass production line and R&D labs of many leading fabs.

Validation: Applied in over 20 production lines and testing of 2 million wafers
Technology Covered:MCU / BCD / PMIC / Flash / CIS / Logic / MEM / III-V
Stability: Uptime>97%
High market share: Becomes the baseline tester in many leading 12-inch fabs

Advantages

WAT Measurement

Covers the measurement of all WAT and WLR items

High Test Efficiency

WPH improvement:
WAT: 1.4-5X
Addressable: 3X-10X or more
DenseArray: over 1000X

Automated Testing

Supports EAP systems, integration with common prober stations, and online/inline testing modes

Customized Configurations

Support configuration of pin numbers and test units based on customer needs

Synergistic Software and Hardware for Efficient Testing and Higher Throughput

Hardware:

· Based on the PXIe architecture with extremely fast response time
· SMU is very fast with sampling rate of 1.8M samples/second
· Relay switching time <2ms
· Excellent performance with short settling time

Parallel Testing:

· Switching/forcing/measuring can all be conducted in parallel

Software:

· Rich built-in algorithm libraries
· Support flexible customization
· Support EAP GEM 300 standards for automated testing
· Compatible with the Windows and Linux systems, and offers multiple algorithm programming languages including TCL, C++, etc

Basic configuration

WAT Tester	T4000 (24/48 pin)*	T4100S (25/48 pin)*
Standard Resources	HR_SMU+HS_SMU (4~18)	Group SMU (25/48)
	Pulse generator (2)	Pulse generator (2)
	Signal analyzer (2)	Signal analyzer (2)
	Switch matrix	HSPU (hybrid signal processing unit)
	LCR Meter (1)	LCR Meter (1)
Number of measurement pins	24/48	25/48
Voltage Coverage	±200 V	±200 V
Current Coverage	±1 A	±1 A
Voltage measure sensitivity	100 nV	100 nV
Current measure sensitivity	10 fA or 0.1fA#	10 fA or 0.1fA#
Voltage measure accuracy	100uV	100uV
Current measurement accuracy	sub-pA	sub-pA
Maximum SMU sample rate	1.8M samples/sec	1.8M samples/sec
Capacitance measurement accuracy	10 fF	10 fF
RO Frequency Coverage	~ 20MHZ	~ 20MHZ
Measurement Functions	DC Current / DC Voltage / Kelvin / Capacitance / Inductance AC Current / AC Voltage / Differential Voltage / Frequency Arbitrary Waveform / Clock Generation / Synchronization (triggering mode)# / C-V scan
Typical Supported Test Items	ID/VT/VTGM/IOFF/ISUB/BV/CAP/ICP
	BETA/VBE/BVCEO/BVCBO/BVEBO
	R2/RKLV/LK/CAP_METAL
	IREAD/ISTANDBY/IDDQ/WM/SNM
	ERASE/PROGRAM
	IDDA/IDDQ/FREQ
	IV/CV
Mean time between failures (MTBF)	> 1000 hours	> 1000 hours
Mean time to repair (MTTR)	< 6 hours	< 6 hours
Uptime rate	~ 97%	~ 97%

# Can select based on user needs
* Both T4000 and T4100S can support WLR test if upgrading software
This table shows recommend testers at different application, if you have other requirements, please contact us.

Software

The testing system offers built-in softwares with user-friendly interface and powerful features, including Algorithm Builder, Testplan Builder and FrameWork. The software can be run in customized Windows or Linux systems.

User-Friendly

· Use TCL/C++ language for algorithm
· Support import and export of spec files in the excel or txt format

Auto Grouping of Test Items

· Support auto grouping of test items with the same initialization conditions to improve testing speed

Automation

· Auto-run integration w/ fab-wide EAP system
· Customizable data format (.lot, .csv, .ad5, etc.)

Other Powerful Functions

· Verification on PC with virtual hardware environment
· Debug mode makes Algo debug much easier and more efficient
· Direct import of baseline testplan
· Real time display
· Early alarm and low yield management
· Automatically retest failed test items which may have probing issues