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Wafer-Level Parametric Testers
High efficiency and accuracy electrical testing for R&D, production and qualification

Overview

During the process of IC product development, manufacturing and qualification, the demand for parametric testing is rapidly increasing. With over ten years of independent research and development, Semitronix has developed its own high efficiency parametric testers. Semitronix‘s testers have been successfully adopted by many leading design houses (Fabless), manufacturing foundries (Fab), integrated device manufacturing companies (IDM) and R&D labs, helping customers completing various test tasks, efficiently and accurately extracting device and process-related electrical parameters, and enabling data-driven power-performance-area-cost (PPAC) optimization, high reliability and yield enhancement of chip products.

Currently, Semitronix‘s testers are used in the following applications: highly parallel R&D testing, highly efficient WAT mass production testing, and wafer level reliability (WLR) testing. In the future, Semitronix will expand its product portfolio to cover more testing applications and meet new testing demands in the market.

Advantages

PERFORMANCE
● Current Sensing Accuracy: <0.1pA
● Voltage Sensing Accuracy: <0.1mV
● Capacitance Accuracy: <0.01pF
● WPH improvement: 1.4X-5X
SOFTWARE
● Algorithm Builder: Easy to edit and debug
● Test Plan Editor: Supports template
● Frame Work: Flexible alarm and low yield handling
● Low Yield Management System (LYM)
● Supports Wafer Level Reliability (WLR)
AUTOMATION
● Support all common probers
● Support SEMI standards and EAP GEM 300
● Support all standard protocols: E5 E30 E37 E39 E40 E87 E90 E94 E84, etc.
Main Features
  • Provide customers with accurate and high-speed solutions for better process monitoring
  • Support two operation modes - online and offline
  • Enable engineers to easily update test plans based on previous test results
  • Provide utilities to directly control prober movements
  • Cover all the WAT items:MOSFETs (Id, Vt, Ioff…), BJT, diode (breakdown), resistors, capacitors, etc.
  • Optimized software and hardware designs to achieve accurate, fast and stable testing

Basic configuration

Tester T4100S系列-copy-1678252710 - 翻译中... T4000系列 - 翻译中... T4100S系列 - 翻译中...
#of PINs 22to 28 24 to 28 22to 28
#of SMUs 22 to 48 (per pin) 6 to 12 (shared SMU) 22 to 48 (per pin)
#of LCR 1 to 2 1 1 to 2
#of PGU 2 2 2
Parallel testing support Yes Yes Yes
Throughput(WPH) ~1.5x-5x ~1.3x-2x ~1.5x-5x
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